Optical system and optical quality measuring apparatus

An optical system comprising: a light source; a photodetector; a first light-receiving system for causing the photodetector to receive first reflected light with a first angle of reflection from a surface; and a second light-receiving system for causing the photodetector to receive second reflected...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Yuki Hiroyuki, Seki Takashi
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An optical system comprising: a light source; a photodetector; a first light-receiving system for causing the photodetector to receive first reflected light with a first angle of reflection from a surface; and a second light-receiving system for causing the photodetector to receive second reflected light with a second angle of reflection, different from the first angle of reflection, from the surface is provided. Here, a first light-receiving area of the photodetector with respect to light, of reflected light from the surface, via the first light-receiving system is spaced apart from a second light-receiving area of the photodetector with respect to light, of the reflected light from the surface, via the second light-receiving system.