Multichannel devices with improved performance and methods of making the same

A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge...

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Hauptverfasser: Freitag Ronald G, Gupta Shalini, Howell Robert S, King Matthew Russell, Henry Howell George, Renaldo Karen Marie, Nechay Bettina A, Parke Justin Andrew, Stewart Eric J, Cramer Harlan Carl
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.