Substrate damage inspection apparatus, production system and inspection method

The present invention relates to the technical field of display, and particularly relates to a substrate damage inspection apparatus, a production system and an inspection method. The substrate damage inspection apparatus comprises a drive unit, support rods, sensors and a controller, wherein the drive unit is connected with the support rods so as to drive the support rods to ascend or descend below a substrate to be detected; and the sensors are disposed on the support rods and communicatively connect with the controller, so as to emit light beams to the substrate to be detected, receive the light beams reflected by the substrate to be detected, and feed them back to the controller. By means of the drive unit and the support rods with the sensors, the substrate damage inspection apparatus realizes damage inspection for the substrate to be detected in a vertical direction. That is, a technical solution provided by the present invention allows for damage inspection for the substrate to be detected when it vertically moves. In addition, the substrate damage inspection apparatus is simple in structure and convenient to operate, thereby having strong utility value and significance of generalization.