Articles with anti-reflective high-hardness coatings and related methods

Methods and articles are provide for: a substrate having first and second opposing surfaces; an intermediate layer substantially covering the first surface of the substrate, the intermediate layer being between about 1-5 microns in thickness and having a hardness of at least 15 GPa; a first outer la...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Wang Jue, Price James Joseph, Paulson Charles Andrew, Enicks Darwin Gene, Oudard Jean-Francois
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Methods and articles are provide for: a substrate having first and second opposing surfaces; an intermediate layer substantially covering the first surface of the substrate, the intermediate layer being between about 1-5 microns in thickness and having a hardness of at least 15 GPa; a first outer layer substantially covering the intermediate layer; and a second outer layer substantially covering the first outer layer, and having a hardness of at least 15 GPa.