Fluid delivery system and method

A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pres...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	McFeron Mitchell W, Tom Glenn M, Chism Richard D, Ware Donald D, Hodges Jordan
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING BOTTLES, JARS OR SIMILAR CONTAINERS DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS HEATING LIGHTING LIQUID HANDLING MECHANICAL ENGINEERING OPENING, CLOSING PERFORMING OPERATIONS STORING OF DISTRIBUTING GASES OR LIQUIDS TRANSPORTING VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES WEAPONS
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Beschreibung
Zusammenfassung:	A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.