Integrated circuits including magnetic tunnel junctions for magnetoresistive random-access memory and methods for fabricating the same

Integrated circuits that include a magnetic tunnel junction (MTJ) for a magnetoresistive random-access memory (MRAM) and methods for fabricating such integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a lower electrode on a metal interco...

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Bibliographische Detailangaben
Hauptverfasser: Nam Seowoo, Child Craig, He Ming, Cho Hyun-Jin
Format: Patent
Sprache:eng
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Zusammenfassung:Integrated circuits that include a magnetic tunnel junction (MTJ) for a magnetoresistive random-access memory (MRAM) and methods for fabricating such integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a lower electrode on a metal interconnect. The metal interconnect is disposed above a semiconductor substrate and is aligned with a normal axis that is substantially perpendicular to the semiconductor substrate. The lower electrode includes a conductive metal plug. A MTJ stack is formed on the lower electrode aligned with the normal axis.