Method of testing a three-dimensional integrated circuit
A method of testing a three-dimensional integrated circuit (3DIC) includes applying a voltage through at least one testing element and at least one conductive line, wherein the at least one conductive line traces a perimeter of at least one of a top chip or an interposer substantially parallel to an...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method of testing a three-dimensional integrated circuit (3DIC) includes applying a voltage through at least one testing element and at least one conductive line, wherein the at least one conductive line traces a perimeter of at least one of a top chip or an interposer substantially parallel to an outer edge of the at least one top chip or the interposer, and the at least one conductive line is configured to electrically connect a plurality of conductive connectors. The method further includes measuring a current responsive to the applied voltage. The method further includes determining an integrity of the 3DIC based on the measured current. |
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