Yaw-rate sensor

A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscil...

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Bibliographische Detailangaben
Hauptverfasser:	Kehr Kersten, Kuhlmann Burkhard, Meisel Daniel Christoph, Hauer Joerg, Ohms Torsten, Classen Johannes, Franke Axel, Kohn Oliver, Gomez Udo-Martin, Neul Reinhard
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS GYROSCOPIC INSTRUMENTS HEATING INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT LIGHTING MEANS FOR DAMPING VIBRATION MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MECHANICAL ENGINEERING NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SHOCK-ABSORBERS SPRINGS SURVEYING TESTING THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.