Segmented graphene growth on surfaces of a patterned substrate layer and devices thereof
A method of forming a graphite-based structure on a substrate comprises patterning the substrate thereby forming a plurality of elements on the substrate. Each respective element in the plurality of elements is separated from an adjacent element on the substrate by a corresponding trench in a plural...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A method of forming a graphite-based structure on a substrate comprises patterning the substrate thereby forming a plurality of elements on the substrate. Each respective element in the plurality of elements is separated from an adjacent element on the substrate by a corresponding trench in a plurality of trenches on the substrate and each respective element in the plurality of elements has a corresponding top surface. The method further comprises segmentedly depositing a graphene initiating layer onto the top surface of each respective element in the plurality of elements; and generating graphene using the graphene initiating layer thereby forming the graphite-based structure. |
---|