Microphone system with driven electrodes

Systems and methods for controlling parameters of a MEMS microphone. The microphone system includes a MEMS microphone and a controller. The MEMS microphone includes a movable electrode, a stationary electrode, and a driven electrode. The movable electrode has a first side and a second side that is o...

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Bibliographische Detailangaben
Hauptverfasser: Doller Andrew J, Sridharan Sucheendran
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Systems and methods for controlling parameters of a MEMS microphone. The microphone system includes a MEMS microphone and a controller. The MEMS microphone includes a movable electrode, a stationary electrode, and a driven electrode. The movable electrode has a first side and a second side that is opposite the first side. The movable electrode is configured such that acoustic pressures acting on the first side and the second of the movable electrode cause movement of the movable electrode. The stationary electrode is positioned on the first side of the movable electrode. The driven electrode is configured to receive a control signal and alter a parameter of the MEMS microphone based on the control signal. The controller is configured to determine a voltage difference between the movable electrode and the stationary electrode. The controller is also configured to generate the control signal based on the voltage difference.