Industrial machine and method for measuring amount of expansion/contraction of industrial machine

An industrial machine includes a moving mechanism moving one of a probe and a tool relative to a work piece, using three displacement axes parallel to each of three orthogonal axis directions; a low thermal expansion member formed with a material having a smaller thermal expansion coefficient than a...

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Bibliographische Detailangaben
1. Verfasser: Sakai Hisayoshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An industrial machine includes a moving mechanism moving one of a probe and a tool relative to a work piece, using three displacement axes parallel to each of three orthogonal axis directions; a low thermal expansion member formed with a material having a smaller thermal expansion coefficient than a material forming a structural element of the moving mechanism; and an expansion/contraction measurer measuring, using the low thermal expansion member as a reference, an amount of expansion/contraction of the structural element in one of the three orthogonal axis directions, the expansion/contraction occurring due to a change in temperature.