Devices, systems, and methods for ion trapping
Devices, methods, and systems for ion trapping are described herein. One device includes a through-silicon via (TSV) and a trench capacitor formed around the TSV.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Devices, methods, and systems for ion trapping are described herein. One device includes a through-silicon via (TSV) and a trench capacitor formed around the TSV. |
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