Method of making semiconductor device and system for performing the same

A method of making a semiconductor device includes determining, by a processor, a first pattern density of a first region, determining a second pattern density of a second region, determining a pattern density gradient from the first region to the second region, determining whether the pattern densi...

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Bibliographische Detailangaben
Hauptverfasser: Tseng Huan Chi, Lo Wan-Yu, Liu Chin-Chou, Fu Chung-Min
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of making a semiconductor device includes determining, by a processor, a first pattern density of a first region, determining a second pattern density of a second region, determining a pattern density gradient from the first region to the second region, determining whether the pattern density gradient exceeds a pattern density gradient threshold and performing a placement or a routing of the semiconductor device if the pattern density gradient is less than or equal to the pattern density gradient threshold.