Transparent material processing with an ultrashort pulse laser

A method for scribing transparent materials uses ultrashort laser pulses to create multiple scribe features with a single pass of the laser beam across the material, with at least one of the scribe features being formed below the surface of the material. This enables clean breaking of transparent ma...

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Bibliographische Detailangaben
Hauptverfasser: Bovatsek James, Arai Alan Y, Yoshino Fumiyo
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for scribing transparent materials uses ultrashort laser pulses to create multiple scribe features with a single pass of the laser beam across the material, with at least one of the scribe features being formed below the surface of the material. This enables clean breaking of transparent materials at a higher speed than conventional techniques.