Method and structure to reduce parasitic capacitance in raised source/drain silicon-on-insulator devices
An aspect of the invention is directed to a silicon-on-insulator device including a silicon layer on an insulating layer on a substrate; a raised source and a raised drain on the silicon layer; a gate between the raised source and the raised drain; a first spacer separating the gate from the raised...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An aspect of the invention is directed to a silicon-on-insulator device including a silicon layer on an insulating layer on a substrate; a raised source and a raised drain on the silicon layer; a gate between the raised source and the raised drain; a first spacer separating the gate from the raised source and substantially covering a first sidewall of the gate; a second spacer separating the gate from the raised drain and substantially covering a second sidewall of the gate; and a low-k layer over the raised source, the raised drain, the gate and each of the first spacer and the second spacer; and a dielectric layer over the low-k layer. |
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