Capacitive humidity sensor

Provided is a capacitive humidity sensor. The capacitive humidity sensor includes an upper electrode disposed on a first plane, a plurality of first electrodes included in the upper electrode, a plurality of second electrodes disposed between the first electrodes, and a humidity sensitive layer surr...

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Bibliographische Detailangaben
Hauptverfasser: Kim Kwan Soo, Koo Sang Geun
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Provided is a capacitive humidity sensor. The capacitive humidity sensor includes an upper electrode disposed on a first plane, a plurality of first electrodes included in the upper electrode, a plurality of second electrodes disposed between the first electrodes, and a humidity sensitive layer surrounding the second electrodes.