Method and arrangement for manufacturing a radiation window

In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At...

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Bibliographische Detailangaben
Hauptverfasser: Kostamo Esa, Kostamo Jari, Mattila Marco, Sipilä Heikki Johannes
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer.