Aqueous polishing slurry

An aqueous polishing slurry having enhanced wettability comprises a detergent blend which includes an anionic alkyl sulfate-based detergent and an alkylbenzene sulfonate detergent together with particulate polishing abrasive.

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Bibliographische Detailangaben
1. Verfasser: Schultz Michael A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An aqueous polishing slurry having enhanced wettability comprises a detergent blend which includes an anionic alkyl sulfate-based detergent and an alkylbenzene sulfonate detergent together with particulate polishing abrasive.