Reduced expansion thermal compression bonding process bond head

Embodiments of a thermal compression bonding process bond head and a method for producing a thermal compression bonding process bond head are disclosed. In some embodiments, the bond head includes a thermal compression bonding process heater and a cooling block coupled to the heater through an annul...

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Bibliographische Detailangaben
Hauptverfasser: Malatkar Pramod, Dhavaleswarapu Hemanth, Neeb James
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Embodiments of a thermal compression bonding process bond head and a method for producing a thermal compression bonding process bond head are disclosed. In some embodiments, the bond head includes a thermal compression bonding process heater and a cooling block coupled to the heater through an annular structure. The annular structure surrounds a lower portion of the cooling block and couples the cooling block to the heater such that there is no direct mechanical contact between the cooling block and the heater.