Double backplate MEMS microphone with a single-ended amplifier input port

A double backplate microphone having a good signal-to-noise ratio and being produceable at reduced manufacturing costs is provided. A microphone comprises a first backplate BP1, a second backplate BP2 and a membrane M. The microphone further comprises an amplifier AMP with a single-ended input port....

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1. Verfasser: Nielsen Ivan Riis
Format: Patent
Sprache:eng
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Zusammenfassung:A double backplate microphone having a good signal-to-noise ratio and being produceable at reduced manufacturing costs is provided. A microphone comprises a first backplate BP1, a second backplate BP2 and a membrane M. The microphone further comprises an amplifier AMP with a single-ended input port. The first backplate BP1 is electrically connected to the single-ended input port.