Protective film and method for producing same

The problems in accordance with the present invention are: to provide a DLC film, wherein a protective film having a segmented shape is easily formed, quality control of the protective film is improved, segmented shapes with a high degree of freedom (that are complicated) are possible, and the appli...

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Bibliographische Detailangaben
Hauptverfasser:	Iwamoto Yoshinao, Matsuo Makoto, Ohtake Naoto
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	The problems in accordance with the present invention are: to provide a DLC film, wherein a protective film having a segmented shape is easily formed, quality control of the protective film is improved, segmented shapes with a high degree of freedom (that are complicated) are possible, and the application of the DLC film is possible not only to two-dimensional shapes but also to three-dimensional shapes; and to provide a method for forming the DLC film. As solutions to the problems, there are provided a protective film and a method for producing the protective film, characterized by, when forming on a substrate the protective film having a segmented shape formed by depositing a film so that the film is formed divided into segments, masking the substrate using a drawing material so that segments having predetermined shapes are obtained, thereafter depositing the protective film, and then removing the masked part to form a spacing between segments.