Microvalve having a reduced size and improved electrical performance

A microvalve includes a displaceable member having an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion. Each of the actuator ribs has a first portion and a second portion, the first portions each having an end con...

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Bibliographische Detailangaben
Hauptverfasser:	Yang Chen, Arunasalam Parthiban, Ojeda, Sr. Joe A, Gurley Gengxun Kara, Fuller E. Nelson
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TAPS THERMAL INSULATION IN GENERAL TRANSPORTING VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A microvalve includes a displaceable member having an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion. Each of the actuator ribs has a first portion and a second portion, the first portions each having an end connected to the central spine, the second portions each having an end connected to the central spine. A channel is formed in the plate. A plurality of elongated openings is formed in the plate and define the actuator ribs, each elongated opening having longitudinally extending side edges. One of the elongated openings separates each rib in the second portion of ribs from an adjacent rib or the plate. The channel and a longitudinally extending side edge of one of the elongated openings separate the second portion of the actuator ribs from the plate and define an electrical isolation region.