Ultra-compact plasma spectrometer

Various examples are provided for collimator assemblies and/or energy analyzer arrays of plasma spectrometers. In one example, among others, an ultra-compact plasma spectrometer includes a collimator assembly; an energy analyzer array that receives charged particles from the collimator; and a detector plate that detects charged particles exiting the energy analyzer array. The energy analyzer array can include a plurality of analyzer plates having distinct energy channels. In another example, a method includes bonding a stack of analyzer plates to form an energy analyzer array, affixing a collimator assembly to the entrance surface of the energy analyzer array, and affixing an array of detectors to the exit surface of the energy analyzer array. The analyzer plates include energy analyzer bands extending from the entrance surface to the exit surface. The aperture arrays and the detectors can align with the energy analyzer bands.