Low internal stress copper electroplating method

Copper electroplating methods provide low internal stress copper deposits. Concentrations of accelerators in the copper electroplating bath vary as a function of the plating current density and the low internal stress copper deposit is observed as a matt copper deposit.

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Bibliographische Detailangaben
Hauptverfasser: Hamm Gary, Allardyce George R, Karaya Narsmoul
Format: Patent
Sprache:eng
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Zusammenfassung:Copper electroplating methods provide low internal stress copper deposits. Concentrations of accelerators in the copper electroplating bath vary as a function of the plating current density and the low internal stress copper deposit is observed as a matt copper deposit.