Three dimensional organic or glass interposer

A three-dimensional organic structure or glass interposer structure and methods of manufacture are disclosed. The method includes forming lined metal vias in a substrate. The method further includes removing the substrate, leaving the lined metal vias. The method further includes forming a new subst...

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Bibliographische Detailangaben
Hauptverfasser: Smith Melissa A, Liu Jin, Landers William F, Schlichting Kathryn E, Farooq Mukta G, Martin Andrew J
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A three-dimensional organic structure or glass interposer structure and methods of manufacture are disclosed. The method includes forming lined metal vias in a substrate. The method further includes removing the substrate, leaving the lined metal vias. The method further includes forming a new substrate about the lined metal vias. The method also includes connecting the lined metal vias to wiring layers using back end of the line processes.