On-off microvalve with improved sealing mechanism

A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion formed within the first op...

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Bibliographische Detailangaben
Hauptverfasser:	Fuller Edward Nelson, Yang Chen, Arunasalam Parthiban, Ojeda, Sr. Joe A, Gurley Gengxun K
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BLASTING CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEATING LIGHTING MECHANICAL ENGINEERING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL TAPS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS THERMAL INSULATION IN GENERAL TRANSPORTING VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion formed within the first opening and having an axis. A surface of the non-movable portion abuts the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The first opening has a notch formed in each of two longitudinally extending side walls thereof. The movable portion defines a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening. The displaceable member has a tab extending outwardly from each of two longitudinally extending side walls thereof, each tab positioned within one of the notches. The displaceable member is slidingly and axially movable within the first opening between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an opened position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port. The notches define stop surfaces that limit travel of the displaceable member between the closed position and the open position.