Apparatus and method for atomic force probing/SEM nano-probing/scanning probe microscopy and collimated ion milling

An apparatus and method for facilitating Atomic Force Microscopy, SEM Nano-Probing, Scanning Probe Microscopy, and Collimated Ion Milling, through the implementation of a removable, magnetized fixture for fixing the position of a sample requiring surface treatment, the fixture attachable to a holder...

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Bibliographische Detailangaben
Hauptverfasser: Nxumalo Jochonia N, Stanton Matthew F, Kane Terence L, Marsin Robert P
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An apparatus and method for facilitating Atomic Force Microscopy, SEM Nano-Probing, Scanning Probe Microscopy, and Collimated Ion Milling, through the implementation of a removable, magnetized fixture for fixing the position of a sample requiring surface treatment, the fixture attachable to a holder requiring surface treatment, the holder being mountable in various instruments, the fixture being transportable in a container having a magnetized surface plate or disc for magnetic attachment of said fixture, with the container having a valve to permit alternative evacuation and backfill with an inert gas to protect the sample surface.