Charged particle beam drawing apparatus
A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a l...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; and a support body supporting the detection unit. |
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