Liquid processing apparatus, liquid processing method, and storage medium that stores computer program for implementing liquid processing method

Liquid processing apparatus, liquid processing method, and storage medium that stores computer program for implementing liquid processing method

A liquid processing apparatus 200 includes a pure water supply source 20; a pure water flow rate control opening/closing valve 27; a sulfuric acid supply unit 30; a sulfuric acid supply opening/closing valve 34; mixing tanks 11 and 12 configured to mix pure water and sulfuric acid to produce a mixed...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Komiya Hiroshi, Eshima Kazuyoshi
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:A liquid processing apparatus 200 includes a pure water supply source 20; a pure water flow rate control opening/closing valve 27; a sulfuric acid supply unit 30; a sulfuric acid supply opening/closing valve 34; mixing tanks 11 and 12 configured to mix pure water and sulfuric acid to produce a mixed chemical liquid and connected to a circulation line 100 having a circulation pump 101; a liquid processing unit 210 configured to perform a liquid process on a substrate W with the mixed chemical liquid. A controller 300 controls a pure water supply opening/closing valve 26, the sulfuric acid supply opening/closing valve 34, and the circulation pump 101, such that operation of the circulation pump 101 is started after starting supply of the pure water to the mixing tanks 11 and 12, and then, supply of sulfuric acid to the mixing tanks 11 and 12 is started.