Thin film transistor substrate and the method thereof
A thin film transistor array panel includes a gate line, a gate insulating layer that covers the gate line, a semiconductor layer that is disposed on the gate insulating layer, a data line and drain electrode that are disposed on the semiconductor layer, a passivation layer that covers the data line...
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creator | Jeong Yu-Gwang Song Jean-Ho Suh Nam-Seok Kim Sung-Ryul Oh Hwa-Yeul Kim Shi-Yul Kim Jong-In Kim Byeong-Beom Hong Pil-Soon Choung Jong-Hyun Bae Yang-Ho Kim Bong-Kyun Yang Dong-Ju Choi Shin-Il Hong Sun-Young Youn Jae-Hyoung Seo O-Sung Park Je-Hyeong Lee Ki-Yeup |
description | A thin film transistor array panel includes a gate line, a gate insulating layer that covers the gate line, a semiconductor layer that is disposed on the gate insulating layer, a data line and drain electrode that are disposed on the semiconductor layer, a passivation layer that covers the data line and drain electrode and has a contact hole that exposes a portion of the drain electrode, and a pixel electrode that is electrically connected to the drain electrode through the contact hole. The data line and drain electrode each have a double layer that includes a lower layer of titanium and an upper layer of copper, and the lower layer is wider than the upper layer, and the lower layer has a region that is exposed. The gate insulating layer may have a step shape. |
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The data line and drain electrode each have a double layer that includes a lower layer of titanium and an upper layer of copper, and the lower layer is wider than the upper layer, and the lower layer has a region that is exposed. 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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | Thin film transistor substrate and the method thereof |
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