Integration of a MEMS beam with optical waveguide and deflection in two dimensions

A high density, low power, high performance information system, method and apparatus are described in which an integrated circuit apparatus includes a plurality of deflectable MEMS optical beam waveguides (e.g., 190) at each die edge which are each formed with an optical beam structure (193) which is encapsulated by a waveguide beam structure (194) to extend into a deflection cavity (198) and which is surrounded by a plurality of deflection electrodes (195-197) that are positioned on walls of the deflection cavity (198) to provide two-dimensional deflection control of each deflectable MEMS optical beam waveguide in response to application of one or more deflection voltages to provide optical communications (e.g., 184) between different die.