Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication

Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication

Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Braithwaite Glyn, Langdo Thomas A, Cheng Zhiyuan, Lochtefeld Anthony J, Currie Matthew T, Fiorenza James
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.