Ultrasonic inspection method, ultrasonic test method and ultrasonic inspection apparatus

The invention is directed to an ultrasonic inspection method, an ultrasonic test method, and an ultrasonic inspection apparatus that enable sizing to be executed even for a minute defect using an ultrasonic wave. A holder holds a transmitting probe for executing an angle beam method and a receiving...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kono Naoyuki, Mizota Hirohisa
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention is directed to an ultrasonic inspection method, an ultrasonic test method, and an ultrasonic inspection apparatus that enable sizing to be executed even for a minute defect using an ultrasonic wave. A holder holds a transmitting probe for executing an angle beam method and a receiving probe for executing a vertical beam method. A motor and a guide rail form a movement mechanism for the transmitting probe and the receiving probe. In an ultrasonic test mode, the transmitting probe executes the angle beam method and transmits and receives an ultrasonic wave. In a sizing mode, the transmitting probe transmits an ultrasonic wave and the receiving probe receives this wave. A tip echo of a wave diffracted from a tip of a defect on a sample and a corner echo reflected from a corner of the defect are measured from a waveform received by the receiving probe.