Single crystal production apparatus and single crystal production method having pedestal with grooves

A single crystal production apparatus using the Czochralski method, includes: a crucible for holding raw material melt; a pedestal that supports the crucible and can be moved upward and downward; a crucible rotating shaft for rotating the crucible via the pedestal; and a melt receiver that is dispos...

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Bibliographische Detailangaben
Hauptverfasser: Sonokawa Susumu, Takeyasu Shinobu, Iwasaki Atsushi
Format: Patent
Sprache:eng
Schlagworte:
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