Module and method for producing extreme ultraviolet radiation

A module for producing extreme ultraviolet radiation, including an extreme ultraviolet radiation-emitting source, the source being provided with a supply configured to supply a fluid of an ignition material to a predetermined target ignition position and a target-igniting mechanism constructed and a...

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Bibliographische Detailangaben
Hauptverfasser:	LOOPSTRA ERIK ROELOF, IVANOV VLADIMIR VITALEVICH, VAN EMPEL TJARKO ADRIAAN RUDOLF, BANINE VADIM YEVGENYEVICH, SWINKELS GERARDUS HUBERTUS PETRUS MARIA, VAN DE VIJVER YURI JOHANNES GABRIËL, MOORS JOHANNES HUBERTUS JOSEPHINA, LABETSKI DZMITRY, SCHIMMEL HENDRIKUS GIJSBERTUS, VAN SCHOOT JAN BERNARD PLECHELMUS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	A module for producing extreme ultraviolet radiation, including an extreme ultraviolet radiation-emitting source, the source being provided with a supply configured to supply a fluid of an ignition material to a predetermined target ignition position and a target-igniting mechanism constructed and arranged to produce a plasma from the ignition material at the target ignition position, the plasma emitting the extreme ultraviolet radiation; a collector mirror constructed and arranged to focus radiation emitted by the plasma at a focal point; and a heat sink having a thermal energy-diverting surface constructed and arranged to divert thermal energy away from the target ignition position, wherein the heat sink is located at a position proximate the target ignition position.