ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same

The -ketoimine ligand is represented by the following formula 1: wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the -ketoimine ligand. A method of forming the -ketoimine ligand and a method of forming a thin film using the metal complex compound inclu...

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Hauptverfasser: SAKURAI ATSUSHI, SHIMIZU MASAKO, WADA SENJI, LEE JIN-SEO, SATO HARUYOSHI, CHO YOUN-JOUNG, UEYAMA JUNJI, YOSHINAKA ATSUYA, CHO KYOOUL, CHOI JUNG-SIK, YOSHINO TOMOHARU
Format: Patent
Sprache:eng
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Zusammenfassung:The -ketoimine ligand is represented by the following formula 1: wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the -ketoimine ligand. A method of forming the -ketoimine ligand and a method of forming a thin film using the metal complex compound including -ketoimine ligand are provided.