ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same
The -ketoimine ligand is represented by the following formula 1: wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the -ketoimine ligand. A method of forming the -ketoimine ligand and a method of forming a thin film using the metal complex compound inclu...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The -ketoimine ligand is represented by the following formula 1: wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the -ketoimine ligand. A method of forming the -ketoimine ligand and a method of forming a thin film using the metal complex compound including -ketoimine ligand are provided. |
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