Semiconductor device with transistor local interconnects

A semiconductor device is provided for implementing at least one logic element. The semiconductor device includes a semiconductor substrate with a first transistor and a second transistor formed on the semiconductor substrate. Each of the transistors comprises a source, a drain, and a gate. A trench...

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Hauptverfasser: NGUYEN CHINH, SOSS STEVEN, VENKATESAN SURESH, LIN IRENE Y, KIM JEFF, KENGERI SUBRAMANI, RASHED MAHBUB, JOHNSON SCOTT, TARABBIA MARC
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device is provided for implementing at least one logic element. The semiconductor device includes a semiconductor substrate with a first transistor and a second transistor formed on the semiconductor substrate. Each of the transistors comprises a source, a drain, and a gate. A trench silicide layer electrically connects one of the source or the drain of the first transistor to one of the source or the drain of the second transistor.