Lid opening/closing system for closed container and substrate processing method using same

Adjacent to an opening portion in an FISM system is provided an enclosure that encloses the operation space of a door and has a second opening portion opposed to the opening portion. A curtain nozzle is provided above the upper edge of the opening portion in the upper portion in the enclosure. A pur...

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Bibliographische Detailangaben
Hauptverfasser:	EMOTO JUN, OKABE TSUTOMU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
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Beschreibung
Zusammenfassung:	Adjacent to an opening portion in an FISM system is provided an enclosure that encloses the operation space of a door and has a second opening portion opposed to the opening portion. A curtain nozzle is provided above the upper edge of the opening portion in the upper portion in the enclosure. A purge gas is supplied from the curtain nozzle along a direction from the upper edge to the lower edge of the opening portion. In addition, a gas outlet through which the purge gas flows from the interior of the enclosure out into the exterior is provided on the wall of the enclosure to which the purge gas flowing in the above described direction is directed, whereby an increase in the partial pressure of oxidizing gases in the interior of the FOUP is prevented.