Implementing low temperature wafer test

A method and structure are provided for implementing low temperature wafer testing of a completed wafer. A coolant gel is applied to the completed wafer, the gel coated wafer is cooled and one or more electrical test probes are applied through the gel to electrical contacts of the cooled wafer, and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUCZYNSKI JOSEPH, NICKEL STEVEN R, HEBIG TRAVIS R
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method and structure are provided for implementing low temperature wafer testing of a completed wafer. A coolant gel is applied to the completed wafer, the gel coated wafer is cooled and one or more electrical test probes are applied through the gel to electrical contacts of the cooled wafer, and testing is performed.