Semiconductor bump-bonded X-ray imaging device

A high pixel density intraoral x-ray imaging sensor includes a direct conversion, fully depleted silicon detector bump bonded to a readout CMOS substrate by cu-pillar bump bonds.

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Hauptverfasser: NYKANEN HENRI TAPIO, LAHTINEN TUOMAS HEIKKI ELMERI, LIN LIMIN, SPARTIOTIS KONSTANTINOS, LAUKKA PASI JUHANI
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creator NYKANEN HENRI TAPIO
LAHTINEN TUOMAS HEIKKI ELMERI
LIN LIMIN
SPARTIOTIS KONSTANTINOS
LAUKKA PASI JUHANI
description A high pixel density intraoral x-ray imaging sensor includes a direct conversion, fully depleted silicon detector bump bonded to a readout CMOS substrate by cu-pillar bump bonds.
format Patent
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subjects BASIC ELECTRIC ELEMENTS
DIAGNOSIS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
MEDICAL OR VETERINARY SCIENCE
PHYSICS
SEMICONDUCTOR DEVICES
SURGERY
TESTING
title Semiconductor bump-bonded X-ray imaging device
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