Forming transistors without spacers and resulting devices

Methods for forming gates without spacers and the resulting devices are disclosed. Embodiments may include forming a channel layer on a substrate; forming a dummy gate on the channel layer; forming an interlayer dielectric (ILD) on the channel layer and surrounding the dummy gate; forming a trench w...

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Hauptverfasser: FLACHOWSKY STEFAN, HOENTSCHEL JAN, ZSCHÄTZSCH GERD
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Methods for forming gates without spacers and the resulting devices are disclosed. Embodiments may include forming a channel layer on a substrate; forming a dummy gate on the channel layer; forming an interlayer dielectric (ILD) on the channel layer and surrounding the dummy gate; forming a trench within the ILD and the channel layer by removing the dummy gate and the channel layer below the dummy gate; forming an un-doped channel region at the bottom of the trench; and forming a gate above the un-doped channel region within the trench.