Tunable filter structures and design structures

Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one sid...

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Bibliographische Detailangaben
Hauptverfasser: STAMPER ANTHONY K, ADKISSON JAMES W, CANDRA PANGLIJEN, DUNBAR THOMAS J, LEIDY ROBERT K, JAFFE MARK D
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.