Magnetic tunnel junction (MTJ) with a magnesium oxide tunnel barrier

A method for fabricating a magnetic tunnel junction (MTJ) is disclosed. The process involves annealing a stack that includes a tunnel barrier layer and cooling the stack under vacuum immediately after annealing. At least one overlayer is deposited on the tunnel barrier layer to form the MTJ.

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Bibliographische Detailangaben
Hauptverfasser:	YAN MINGLANG, SHEN JIAN X, HUANG XIAOBO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A method for fabricating a magnetic tunnel junction (MTJ) is disclosed. The process involves annealing a stack that includes a tunnel barrier layer and cooling the stack under vacuum immediately after annealing. At least one overlayer is deposited on the tunnel barrier layer to form the MTJ.