Droplet generator steering system

Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BAUMGART PETER M, GOVINDARAJU ABHIRAM, ALGOTS J. MARTIN, RAJYAGURU CHIRAG
Format:	Patent
Sprache:	eng
Schlagworte:	BEARINGS BLASTING ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROTHERAPY ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GAMMA RAY OR X-RAY MICROSCOPES GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEATING HUMAN NECESSITIES HYGIENE IRRADIATION DEVICES LIGHTING MAGNETOTHERAPY MECHANICAL ENGINEERING MEDICAL OR VETERINARY SCIENCE NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS RADIATION THERAPY ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR THERMAL INSULATION IN GENERAL ULTRASOUND THERAPY WEAPONS X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning.