Method for producing hexachlorodisilane

A method produces hexachlorodisilane. Hexachlorodisilane is obtained by oxidative splitting of the chlorinated polysilane of the empirical formula SiClx (x=0,2-0,8) using chlorine gas. The hexachlorodisilane is selectively obtained with a high yield.

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Bibliographische Detailangaben
Hauptverfasser:	MOHSSENI JAVAD, DELTSCHEW RUMEN, LIPPOLD GERD, HOLL SVEN, AUNER NORBERT, GEBEL THORALF, BAUCH CHRISTIAN
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A method produces hexachlorodisilane. Hexachlorodisilane is obtained by oxidative splitting of the chlorinated polysilane of the empirical formula SiClx (x=0,2-0,8) using chlorine gas. The hexachlorodisilane is selectively obtained with a high yield.