Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus

There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K1-w-xNawSrx)m(Nb1-yZry)O3 and which is preferentially oriented to (001), and a pair of electrode films that sandwic...

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Bibliographische Detailangaben
Hauptverfasser:	KURACHI KATSUYUKI, AIDA YASUHIRO, MAEJIMA KAZUHIKO, SAKUMA HITOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS DIAGNOSIS ELECTRICITY GYROSCOPIC INSTRUMENTS HUMAN NECESSITIES HYGIENE i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME IDENTIFICATION INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER LINING MACHINES MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEDICAL OR VETERINARY SCIENCE NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS SURGERY SURVEYING TESTING TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K1-w-xNawSrx)m(Nb1-yZry)O3 and which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.