Focus control apparatus and method

A focus control apparatus and method capable of generating a focus position signal according to focus position error even in proximity to an interface between regions having different thicknesses, to perform a high precision focus position control using the focus position signal, are provided. A foc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SEKIYA HARUTAKA, TOGASHI MITSUHIRO
Format: Patent
Sprache:eng
Schlagworte:
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