Focus control apparatus and method
A focus control apparatus and method capable of generating a focus position signal according to focus position error even in proximity to an interface between regions having different thicknesses, to perform a high precision focus position control using the focus position signal, are provided. A foc...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A focus control apparatus and method capable of generating a focus position signal according to focus position error even in proximity to an interface between regions having different thicknesses, to perform a high precision focus position control using the focus position signal, are provided. A focus control apparatus includes an error signal correction portion configured to process a focus error signal that indicates an error of a focus position of an optical system with respect to an object. Moreover, the focus control apparatus includes a region conversion detection portion configured to output a region signal that corresponds to a first region or a second region of the object. The first and second regions of the object have different respective heights. |
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