MEMS device including a mobile element and a resistive sensor, and method for generating a signal indicating the position of the mobile element

A MEMS device includes a supporting body, a first deformable element and a second deformable element, and a mobile element set between the first and second deformable elements and rotatable with respect to the fixed supporting body. A generator causes a current to flow through at least one of the fi...

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Bibliographische Detailangaben
Hauptverfasser:	DEFAZIO MARCO, MURARI BRUNO
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING ELECTRIC VARIABLES MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING MAGNETIC VARIABLES MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A MEMS device includes a supporting body, a first deformable element and a second deformable element, and a mobile element set between the first and second deformable elements and rotatable with respect to the fixed supporting body. A generator causes a current to flow through at least one of the first and second deformable elements, which function as resistors, so as to generate an electrical position signal proportional to deformation of the first and second deformable elements and indicative of angular position of the mobile element. The electrical signal is processed to determine mobile element angular position. A drive signal is generated in response to the electrical signal for the purpose of driving oscillation of the mobile element.