Coupling apparatus for chemical fluid flow channel

A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on a...

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Bibliographische Detailangaben
Hauptverfasser: KOUKETSU MASAYUKI, ITAFUJI HIROSHI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.